LOZIX high
- The LOZIX high is an specialized "All in one" platform design Photo Track for immersion process.
Developed using SEMES advanced technology, the LOZIX high achieves the highest throughput in the
industry and unsurpassed stability with environmental control system, precision liquid controller,
improved bake plate and correct TACT control. 
- ■ High throughput with smallest footprint
: Rapid throughput of over 220 WPH with the optimum wafer path and the load displersion system.
: Compact size with new concepted module design.
■ Stabilized environment control system
: Realize the most efficiency and reliability by whole process environment control system.
: Available to control the Temp. offset in detail with specialized Multi Zone Hot Plate.
: Upgraded detergency for minute pattern by control of the inertia on each position of wafer with
recipe control ability.
■ RAMs for CoO (Reliability Availability Maintainability for Cost of Ownership)
: Archive the best efficiency by improved design .
: Maximized CoO by precision vomit control for PR and other chemical with SDS(SEMES DISPENCE
SYSTEM)
: Enhanced MTBP by wide displacement and improved air current.
■ Improved function for Immersion process
: Maximized particle removing ability and CD Uniformity on back side of wafer by a specialized back
side cleaning unit.
Product
